Abstract:
Preparation of Li doped ZnO film grown on Si substrate was presented. Surface morphology and microstructural observation of Li doped ZnO film were investigated by SEM. Li doped ZnO film quality and homogeneity were examined by SEM images. Grain sizes of Li doped ZnO films were predicted from SEM images. Pore and grain growth of these films were also analyzed.
Keywords : SEM, pore, grain size
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