Abstract:
MgTiO3 thin films are prepared by sol-based method. Thin films are deposited onto p-type silicon by spin-coating technique with constant speed and heat treated at 600 for 1 hr to form MOS capacitor. From the I-V data, the saturation current (Io) are estimated from the plot: ideality factor and zero-bias barrier height are systematically investigated by the Schottky equation. From the C-V data, the flat-band voltage (up and down), the threshold voltage (up and down) and width are estimated the graphs.
Keywords: ideality factor, zero-bias barrier beight, flat-band voltage, threshold voltage
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