Abstract:
MgTiO3 thin films are prepared by solid sol-based method. Thin films are deposited onto p-type silicon by spin coating technique with constant speed and heat treated at 600°C for 1 hr to form MOS capacitor. The device is characteristics of thin film capacitors are carried out. The results are analyzed and found that the characteristics of P-E from the hysteresis loop, the remanent polarization (Pr), the remanent polarization (Ps), the coercive field (Ec) and the memory window (MW) are measured.
Keywords: hysteresis loop, P-E variation.
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